A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Acoustical Science and Technology
سال: 2010
ISSN: 1346-3969,1347-5177
DOI: 10.1250/ast.31.115